In the field of global integrated circuit manufacturing, tight production capacity has become the norm, which has prompted my country’s investment in integrated circuit-related fields to grow significantly in the past two years. This wave of investment has not only promoted the vigorous development of semiconductor device equipment, electronic components and electronic special materials manufacturing industries, but also led to a surge in demand for high-performance materials such as PEEK. PEEK materials, with their excellent high temperature resistance, wear resistance, dimensional stability, chemical corrosion resistance and easy processing, have shown unparalleled advantages in the semiconductor manufacturing process. Especially in the field of wafer clamping, PEEK wafer clamps have become an indispensable ideal tool in semiconductor manufacturing with their unique properties. It can not only effectively ensure the integrity of the wafer, but also significantly improve production efficiency and yield. Therefore, in the semiconductor industry, PEEK wafer clamps are receiving more and more attention and are widely used. The core advantages of PEEK wafer clamps are as follows: Pollution-free clamping PEEK wafer clamps are made of modified PEEK particles, which are extremely pure and contain almost no trace elements that may contaminate silicon wafers, ensuring absolute safety during the clamping process. Antistatic protection PEEK wafer clamps have excellent antistatic properties, with a surface resistivity of up to 10^5-10^10Ω, and the chuck part is as high as 10^7-10^8Ω, which effectively prevents instantaneous electrostatic discharge from damaging silicon wafers and provides all-round protection for the wafers. High temperature stability PEEK wafer clamps can be used for a long time in a high temperature environment of 260℃, and maintain high strength, dimensional stability and a small linear expansion coefficient. It has excellent resistance to sliding wear and fretting wear, and will not produce scratches or residues on the surface when clamping wafers and silicon wafers, thereby ensuring the surface cleanliness of wafers and silicon wafers.
It is worth mentioning that the developed PEEK5600ESDZ01 particles, as an anti-static material designed specifically to solve the problem of static electricity, have a stable and controllable surface resistivity, which can meet the requirements of 10^5-10^9Ω. The material has excellent performance in anti-static property, easy processing and appearance, and is widely used in the fields of electronics, semiconductors, petroleum industry, etc., effectively reducing the loss caused by static electricity. In addition, the anti-static particles are also used in the shells and structural parts of explosion-proof products, such as the shells and structural parts of electrical products in coal mines, oil tankers, oil fields and other occasions, showing a wide range of application prospects and huge market potential.